1. Computational defect review for actinic mask inspections;Morgan,2013
2. Computational mask defect review for contamination and haze inspections;Morgan,2013
3. Compensation methods using a new model for buried defects in extreme ultraviolet lithography masks;Clifford,2010
4. Mask Defect Auto Disposition based on Aerial Image in Mask Production;Chen,2009
5. Printability and actinic AIMS review of programmed mask blank defects;Verduijn,2017