Generation of arbitrary freeform source shapes using advanced illumination systems in high-NA immersion scanners-Reference-Cited by-同舟云学术

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Generation of arbitrary freeform source shapes using advanced illumination systems in high-NA immersion scanners

Published:2010-03-11 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Zimmermann Jörg,Gräupner Paul,Neumann Jens T.,Hellweg Dirk,Jürgens Dirk,Patra Michael,Hennerkes Christoph,Maul Manfred,Geh Bernd,Engelen Andre,Noordman Oscar,Mulder Melchior,Park Sean,De Vocht Joep

Publisher

SPIE

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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