1. H. Levinson, [Principles of Lithography], SPIE Press, Bellingham, WA, (2001).
2. Fundamental principles of Optical Lithography: The science of Microfabrication;Mack,2007
3. V. Bakshi, [EUV Lithography], SPIE Press, Bellingham, WA, (2009).
4. Printability of extreme ultraviolet lithography mask pattern defects for 22-40 nm half-pitch features;Kloster,2010
5. Defect printability study using EUV lithography;Holfeld,2006