Accelerated phase-measuring algorithm of least squares for phase-shifting interferometry
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Cited by 32 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Chromaticity-integrated principal component analysis for spectral phase measurement in spectrally resolved white light interferometry;Applied Optics;2024-09-12
2. Dynamic measurement of thickness distribution in a soap film by using a phase-modulated large lateral shearing interferometer;2021 IEEE International Instrumentation and Measurement Technology Conference (I2MTC);2021-05-17
3. Statistical average method for phase extraction under two-step phase-shifting interferometry;Optics Frontier Online 2020: Optics Imaging and Display;2020-10-07
4. Phase shifting method for non-sinusoidal interference fringes with phase shift error;Japanese Journal of Applied Physics;2019-10-21
5. m-resolution thickness distribution measurement of transparent glass films by using a multi-wavelength phase-shift extraction method in the large lateral shearing interferometer;Optics Express;2019-01-30
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