Fabrication and characterization of SU-8-based capacitive micromachined ultrasonic transducer for airborne applications-Reference-Cited by-同舟云学术

Fabrication and characterization of SU-8-based capacitive micromachined ultrasonic transducer for airborne applications

Published:2018-02-14 Issue:01 Volume:17 Page:1
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Joseph Jose¹,Singh Shiv Govind¹,Vanjari Siva Rama Krishna¹

Affiliation:

1. Indian Institute of Technology Hyderabad, Department of Electrical Engineering, Kandi, Sangareddy, T

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference57 articles.

1. Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts

2. 3-D ultrasound imaging: a review

3. MEMS Based Broadband Piezoelectric Ultrasonic Energy Harvester (PUEH) for Enabling Self-Powered Implantable Biomedical Devices

4. Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?

5. Modeling, Fabrication, and Characterization of Piezoelectric Micromachined Ultrasonic Transducer Arrays Based on Cavity SOI Wafers

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