Author:
Faurie P.,Foucher J.,Foucher A.-L.
Cited by
6 articles.
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1. Unbiased line edge roughness measurement using profile-averaging method for precise roughness parameters measurement;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-05-30
2. Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology;Journal of Micro/Nanolithography, MEMS, and MOEMS;2020-10-23
3. Line edge roughness measurement on vertical sidewall for reference metrology using a metrological tilting atomic force microscope;Journal of Micro/Nanolithography, MEMS, and MOEMS;2020-03-23
4. Comparison of SEM and AFM performances for LER reference metrology;Metrology, Inspection, and Process Control for Microlithography XXXIV;2020-03-20
5. Accurate vertical sidewall measurement by a metrological tilting-AFM for reference metrology of line edge roughness;Metrology, Inspection, and Process Control for Microlithography XXXIII;2019-03-26