Improvement in accuracy of defect size measurement by automatic defect classification-Reference-Cited by-同舟云学术

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Improvement in accuracy of defect size measurement by automatic defect classification

Published:2015-10-23 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Samir Bhamidipati,Pereira Mark,Paninjath Sankaranarayanan,Jeon Chan-Uk,Chung Dong-Hoon,Yoon Gi-Sung,Jung Hong-Yul

Publisher

SPIE

Reference6 articles.

1. Automatic Classification and Accurate Size Measurement of Blank Mask Defects;Bhamidipati,2015

2. Automatic Classification of Blank Substrate Defects;Boettiger,2014

3. Key issues in Automatic Classification of Defects in post-Inspection Review Process of Photomasks;Pereira,2012

4. Digital Image Processing;Gonzalez,2008

5. EUV mask defect mitigation through pattern placement;John,2010

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Pose Estimation and Damage Characterization of Turbine Blades during Inspection Cycles and Component-Protective Disassembly Processes;Sensors;2022-07-11

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