EUV source system development update: advancing along the path to HVM
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SPIE
Cited by 30 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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2. Characteristics of discharge and beyond extreme ultraviolet spectra of laser induced discharge gadolinium plasma;Optics & Laser Technology;2021-06
3. Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the Institute of Spectroscopy, Russian Academy of Sciences);Physics-Uspekhi;2019-03-31
4. Extreme-ultraviolet collector mirror measurement using large reflectometer at NewSUBARU synchrotron facility;Japanese Journal of Applied Physics;2016-05-11
5. Laser-plasma extreme ultraviolet and soft X-ray sources based on a double stream gas puff target: interaction of the radiation pulses with matter;Opto-Electronics Review;2015-01-01
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