Author:
Dick Andrew R.,Bell William K.,Luke Brendan,Maines Erin,Mueller Brennan,Kohl Paul A.,Rawlings Brandon,Willson C. Grant
Reference13 articles.
1. Geffken, R. M. IEDM Tech Digest 542 (1983)
2. Uttecht, R. R., Geffken, R. M. VMIC Proc. 20, (1991)
3. [Polyimides: Fundamentals and Applications];Ghosh,1996
4. Silicon Interposer with TSVs and Fine Multilayer Wiring;Sunohara,2008
5. Etching polymer films with ultraviolet laser pulses of long (10–400 μs) duration