Hp-finite element method for simulating light scattering from complex 3D structures-Reference-Cited by-同舟云学术

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Hp-finite element method for simulating light scattering from complex 3D structures

Published:2015-03-19 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Burger Sven,Zschiedrich Lin,Pomplun Jan,Herrmann Sven,Schmidt Frank

Publisher

SPIE

Reference25 articles.

1. Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair;Pang,2012

2. Three-dimensional integrated circuits

3. Gaps analysis for CD metrology beyond the 22nm node;Bunday,2013

4. Benchmark of FEM, waveguide and FDTD algorithms for rigorous mask simulation;Burger,2005

5. Benchmark of rigorous methods for electromagnetic field simulation;Burger,2008

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