Commentary: Multichannel ellipsometry for monitoring processes

Author:

An Ilsin

Publisher

SPIE-Intl Soc Optical Eng

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. K. Vedam, "Spectroscopic ellipsometry: a historical overview," Thin Solid Films 313/314, 1-9 (1998) 10.1016/S0040-6090(97)00762-1

2. R. W. Collins, I. An, H. Fujiwara, J. Lee, Y. Lu, J. Koh, and P. I. Rovira, "Advances in multichannel spectroscopic ellipsometry," Thin Solid Films 313-314, 18-32 (1998) 10.1016/S0040-6090(97)00764-5

3. I. An, H. V. Nguyen, N. V. Nguyen, and R. W. Collins, "Microstructural evolution of ultrathin amorphous silicon films by real-time spectroscopic ellipsometry," Phys. Rev. Lett. 65, 2274-2277 (1990) 10.1103/PhysRevLett.65.2274

4. C. Pickering, "Complementary in-situ and post-deposition diagnostics of thin film semiconductor structures," Thin Solid Films 313/314, 406-415 (1998) 10.1016/S0040-6090(97)00855-9

5. I. An and D. Seong, "Morphological development and etching of gold thin film under UV-exposure in chlorine-based liquids," Chem. Lett. 33, 1232-1235 (2004) 10.1246/cl.2004.1232

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