Process improvements in the production of silicon immersion gratings-Reference-Cited by-同舟云学术

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Process improvements in the production of silicon immersion gratings

Published:2016-07-22 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Brooks Cynthia B.¹,Kidder Benjamin¹,Grigas Michelle¹,Griesmann Ulf²,Wilson Daniel W.³,Muller Richard E.³,Jaffe Daniel T.¹

Affiliation:

1. The Univ. of Texas at Austin (United States)

2. National Institute of Standards and Technology (United States)

3. Jet Propulsion Lab. (United States)

Publisher

SPIE

Reference9 articles.

1. Production and evaluation of silicon immersion gratings for infrared astronomy

2. Manufacturing of silicon immersion gratings for infrared spectrometers;Weisong,2010

3. New metrology techniques improve the production of silicon diffractive optics;Cynthia,2014

4. Shipley Microposit® S1800® Series Photo Resists product literature. http://www.microchem.com/PDFs_Dow/S1800.pdf

5. High performance Si immersion gratings patterned with electron beam lithography;Michael,2014

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication error detection in diffraction gratings with high dynamic range Fourier plane imaging and spatial filtering;Optical Engineering;2023-01-09

2. Design and fabrication of silicon immersion grating;Seventh Symposium on Novel Photoelectronic Detection Technology and Applications;2021-03-12

3. Sensing fabrication errors in diffraction gratings using high dynamic range imaging;Optics Express;2019-07-19

4. Early Identification of Patterning Errors in the Fabrication Process of Diffraction Gratings;Optical Design and Fabrication 2019 (Freeform, OFT);2019

5. A high dynamic range imaging method for the characterization of periodic errors in diffraction gratings;Reflection, Scattering, and Diffraction from Surfaces VI;2018-09-04

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