An innovative single development process for integrated optical Mach-Zehnder interferometer pattern transfer
Author:
Affiliation:
1. Univ. Malaysia Perlis (Malaysia)
2. Univ. Putra Malaysia (Malaysia)
3. Infineon Technologies (Malaysia) Sdn Bhd (Malaysia)
4. National Defence Univ. of Malaysia (Malaysia)
Publisher
SPIE
Reference8 articles.
1. Remote opto-chemical sensing with extreme sensitivity: design, fabrication and performance of a pigtailed integrated optical phase-modulated Mach–Zehnder interferometer system
2. Sensitive optical biosensors for unlabeled targets: A review
3. Design of integrated optical Mach-Zehnder interferometer biosensor for ideal surveillance rapid diagnostic test;Khor,2014
4. All-optical phase modulation for integrated interferometric biosensors
5. Characterization of resolution for integrated optical Mach-Zehnder Interferometer with optimization of photolithography process;Lau,2014
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