Author:
Wen Yongfu,Qu Weijuan,Cheng Haobo,Asundi Anand
Reference16 articles.
1. Integrated electrostatic micro-sensors for the development of modeling techniques of defects in the actuation of large micro-electromechanical systems (MEMS);Reissman,2006
2. A digital holographic microscope for complete characterization of microelectromechanical systems
3. Process engineering and failure analysis of MEMS and MOEMS by Digital Holography Microscopy (DHM);Montfort,2007
4. Compact handheld digital holographic microscopy system development;Vijay,2010
5. Further investigation on the phase stitching and system errors in digital holography