Author:
Bischoff Jörg,Mastylo Rostyslaw,Granet Gerard,Manske Eberhard
Reference22 articles.
1. Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology;Jäger;Surface Topography: Metrology Properties,2016
2. Ongoing trends in precision metrology,
particularly in nanopositioning and nanomeasuring technology
3. Optical Digital Profilometry Applications on Contact Holes;Bischoff,2003
4. Model-based SEM for dimensional metrology tasks in semiconductor and mask industry
5. Optische und taktile Nanosensoren auf der Grundlage des Fokusverfahrens für die Anwendung in Nanopositionier- und Nanomessmaschinen;Mastylo,2012
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献