Maximization of layout printability/manufacturability by extreme layout regularity
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SPIE
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Lithography hotspot detection using a double inception module architecture;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-03-22
2. A novel approach of ensuring layout regularity correct by construction in advanced technologies;SPIE Proceedings;2017-03-17
3. Online and Operand-Aware Detection of Failures Utilizing False Alarm Vectors;Proceedings of the 25th edition on Great Lakes Symposium on VLSI;2015-05-20
4. Layout pattern-driven design rule evaluation;Journal of Micro/Nanolithography, MEMS, and MOEMS;2014-12-17
5. Full-Chip Layout Optimization for Process Margin Enhancement Using Model-Based Hotspot Fixing System;Japanese Journal of Applied Physics;2010-06-21
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