High-efficiency fill factor recovery using refractive microlens arrays imprinted on 0.5–256 kpixel front-side illuminated SPAD imagers-Reference-Cited by-同舟云学术

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High-efficiency fill factor recovery using refractive microlens arrays imprinted on 0.5–256 kpixel front-side illuminated SPAD imagers

Published:2023-03-15 Issue: Volume: Page:
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Container-title:Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI
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Author:

Bruschini Claudio E.,Antolović Ivan Michel,Zanella Frédéric,Ulku Arin C.,Lindner Scott,Kalyanov Alexander L.,Milanese Tommaso,Bernasconi Ermanno,Pešic Vladimir,Charbon Edoardo

Publisher

SPIE

Reference13 articles.

1. Single-photon imaging in complementary metal oxide semiconductor processes;Charbon;Philos. Trans. R. Soc. London, Ser. A,2014

2. Historical Perspectives, State of Art and Research Trends of SPAD Arrays and Their Applications (Part II: SPAD Arrays);Cusini;Front. Phys.,2022

3. Single-photon avalanche diode imagers in biophotonics: review and outlook

4. Measurement and modeling of microlenses fabricated on single-photon avalanche diode arrays for fill factor recovery

5. Optical-stack optimization for improved SPAD photon detection efficiency;Antolovic;Proc. SPIE,2019

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