Author:
Chabala Jan M.,Cole Damon M.,Pearce-Percy Henry T.,Phillips Wayne,Lu Maiying,Weaver Suzanne,Alexander David W.,Coleman T.,Sauer Charles A.,Abboud Frank E.
Cited by
1 articles.
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1. Partial blanking of an electron beam using a quadrupole lens;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2005