Author:
Huang Zhenxin,Yang Zenghui,Zhu Linglin,Zeng Aijun,Huang Huijie
Reference7 articles.
1. Polarization design and simulation of lighting system ofimmersion scanners [D];Ruyi,2022
2. Research on freeform pupil lighting technology ofimmersion scanners [D];Zongshun,2020
3. Evaluation Algorithm of Pupil Characteristic Parameters in Lithography Illumination System