The planar silicon-based microelectronic technology for electrochemical transducers

Author:

Novikov A. V.1,Egorchikov A. E.1,Dolgov A. N.1,Gornev E. S.2,Popov V. G.3,Egorov I. V.4,Krishtop V. G.3

Affiliation:

1. Mikron JSC (Russian Federation)

2. JCS Molecular Electronics Research Institute (Russian Federation)

3. Institute of Microelectronics Technology and High Purity Materials (Russian Federation)

4. Moscow Institute of Physics and Technology (State Univ.) (Russian Federation)

Publisher

SPIE

Reference10 articles.

1. The current state of development in the field of molecular electronic transducers of motion parameters and wave fields;Kozlov,2004

2. Modern measuring instruments based on molecular electronic transducers;Shabalina;Achievements of Modern Radioelectronics,2014

3. Electrochemical Seismometers of Linear and Angular Motion;Agafonov,2015

4. Measuring Means Based on Molecular-Electron Transfer in Micro-and Nanostructures;Agafonov;Journal of Nano and Microsystem Technique,2010

5. Technological principles of motion parameter transducers based on mass and charge transport in electrochemical microsystems

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2. Study of the electrochemical part of the transfer function of an electrochemical transducer with metal mesh electrodes;Journal of Electroanalytical Chemistry;2020-07

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