Characteristics of polycrystalline silicon thin-film transistors with thin oxide/nitride gate structures
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Published:1993
Issue:8
Volume:32
Page:1798
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ISSN:0091-3286
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Container-title:Optical Engineering
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language:en
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Short-container-title:Opt. Eng.
Author:
Cheng Huang-Chung
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics