Reducing DfM to practice: the lithography manufacturability assessor
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Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Robustness of Quantum Federated Learning (QFL) Against “Label Flipping Attacks” for Lithography Hotspot Detection in Semiconductor Manufacturing;2024 IEEE International Reliability Physics Symposium (IRPS);2024-04-14
2. Lithography Hotspot Detection Based on Heterogeneous Federated Learning with Local Adaptation and Feature Selection;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2023
3. Lithography Hotspot Detection via Heterogeneous Federated Learning with Local Adaptation;2022 27th Asia and South Pacific Design Automation Conference (ASP-DAC);2022-01-17
4. Fast prediction of process variation band through machine learning models;Optical Microlithography XXXIV;2021-03-12
5. Incorporating process variation contours in design rule calculation and SRAM design optimization;Design-Process-Technology Co-optimization for Manufacturability XIII;2019-03-20
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