Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. M. Born and E. Wolf ,Principles of Optics, 6th ed., Chapter 8.8.2, Pergamon, Oxford (1980).
2. The coefficient in nonparaxial λ/NA scaling equations for resolution, depth of focus, and immersion lithography
3. Real and imaginary phase-shifting masks
4. C. A. Mack , “Using the normalized image log-slope,”Microlithography World, p. 23 (February 2001).
5. Process window overlap for posts and lines and spaces: optimization by resist type, optical settings, and mask bias
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