Thickness measurement of transparent film by white-light interferometry
Author:
Affiliation:
1. Institute of Optics and Electronics (China)
Publisher
SPIE
Reference11 articles.
1. Nondestructive film thickness measurement on industrial diamond
2. A comparison of methods for accurate film thickness measurement,;King,2001
3. Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry
4. Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry
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1. Nonlinear phase error analysis of equivalent thickness in a white-light spectral interferometer;Nanotechnology and Precision Engineering;2019-06
2. Fast thickness measurement of thin films using two-dimensional Fourier transform-based structured illumination microscopy;9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics;2019-01-30
3. Measurement of material thickness in the presence of a protective film;SPIE Proceedings;2017-05-01
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