FEM simulation of the material removal in pad polishing

Author:

Almeida R.1,Börret R.1,Rimkus W.1,Harrison D.2,DeSilva A.2

Affiliation:

1. Aalen Univ. (Germany)

2. Glasgow Caledonian Univ. (United Kingdom)

Publisher

SPIE

Reference6 articles.

1. Modeling of the polishing process for aspheric optics;Kelm,2008

2. Bliedtner, J., Gräfe, G. & Hector, R.,. Optical Technology. McGraw-Hill, New York; (2011)

3. Anon., 2014. Livermore Software Technology Corporation. [Online] Available at: http://www.lstc.com/products/ls-dyna [September,19th, 2014]

4. HyperWorks, A., 2014. Altair HyperMesh. 4 December, pp. http://www.altairhyperworks.com/ Product, 7, HyperMesh.aspx? AspxAutoDetectCookieSupport=1.

5. Börret, R., Kelm, A., Thiess, H. & Giggel, V., 2007. ASPHERO5 - Simulation and analysis of the polishing process. Key Engineering Materials, Band 364-366, pp. 488–492.

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