1. EUV lithography optics for sub-9nm resolution;Kneer,2015
2. Interactions of 3D mask effects and NA in EUV lithography;Neumann,2012
3. Architectural choices for EUV Lithography masks: patterned absorbers and patterned reflectors;La Fontaine,2004
4. The Impact of Mask Design on EUV Imaging;Schmoeller,2009
5. EUV Mask Making: An Approach Based on the Direct Patterning of the EUV Reflector;Chovino,2003