MEMS Tabanlı Elektrotermal Mikro-Aktüatörün Tasarımı ve Sonlu Elemanlar Analizi
Author:
Publisher
El-Cezeri: Journal of Science and Engineering
Subject
General Physics and Astronomy,General Engineering,General Chemical Engineering,General Chemistry,General Computer Science
Reference17 articles.
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2. [2] Singh, J., Kumar, A., Chelvane, J. A., Stress Compensated MEMS Magnetic Actuator Based on Magnetostrictive Fe65Co35 Thin Films, Sensors and Actuators A: Physical, 2019, 294 (1), 54-60.
3. [3] Çiftçi, H., ERSOY, B. Adsorption of Cr (VI) Ions on Magnetite Nano-Particles (Fe3O4): Kinetic and Thermodynamic Studies. El-Cezeri Journal of Science and Engineering, 2016, 3(3), 417-427.
4. [4] Rodríguez, G. A. A., Suhard, S., Rossi, C., Esteve, D., Fau, P., Sabo-Etienne, S., Chaudret, B., A Microactuator Based on the Decomposition of an Energetic Material for Disposable lab-on-chip Applications: Fabrication and Test, Journal of Micromechanics and Microengineering, 2008, 19 (1), 12-25.
5. [5] Wang, J., Zhang, W., Wang, L., Shen, R., Xu, X., Ye, J., Chao, Y., Novel Approach to the Preparation of Organic Energetic Film for Microelectromechanical Systems and Microactuator Applications. ACS applied materials & interfaces, 2014, 6 (14), 10992-10996.
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