Ion energy distributions on surfaces exposed to plasmas: An experimental and theoretical investigation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.351454
Reference16 articles.
1. Review of plasma-assisted deposition processes
2. Surface hydrogen content and passivation of silicon deposited by plasma induced chemical vapor deposition from silane and the implications for the reaction mechanism
3. Kinetic theory of the plasma sheath transition in a weakly ionized plasma
4. Exact Solution of the Collisionless Plasma-Sheath Equation
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