Production of atomic or molecular nitrogen ion beams using a multicusp and a microwave ion source
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.340302
Reference9 articles.
1. Ion implantation and ion assisted coating of metals
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3. XPS studies at various depths of low energy N2+ ions implanted on 304 stainless steel
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5. Characteristics of a compact microwave ion source
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