Effects of electrode gap on radio-frequency discharge characteristics with a hollow electrode
Author:
Affiliation:
1. School of Physics, Beijing Institute of Technology, Beijing 100081, China
2. College of Science, Beijing University of Civil Engineering and Architecture, Beijing 102616, China
Funder
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0022019
Reference50 articles.
1. Radio frequency hollow cathodes for the plasma processing technology
2. Thin film processing by radio frequency hollow cathodes
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4. Particle-in-cell simulations of hollow cathode enhanced capacitively coupled radio frequency discharges
5. Dynamics of hollow cathode discharge using fluid models with and without metastable atom involvement in helium
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