Film transfer enabled by nanosheet seed layers on arbitrary sacrificial substrates
Author:
Affiliation:
1. MESA+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands
Funder
Nederlandse Organisatie voor Wetenschappelijk Onderzoek (Netherlands Organisation for Scientific Research)
Publisher
AIP Publishing
Subject
General Engineering,General Materials Science
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/aplmater/3/5/1.4921070.pdf?itemId=/content/aip/journal/aplmater/3/5/10.1063/1.4921070&mimeType=pdf&containerItemId=content/aip/journal/aplmater
Reference16 articles.
1. Low-Temperature Deposition of Pb(Zr,Ti)O3Thin Films on Si Substrates Using Ba(Mg1/3Ta2/3)O3as Buffer Layer
2. Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process
3. Fabrication of single-crystalline LiTaO[sub 3] film on silicon substrate using thin film transfer technology
4. The oriented growth of zirconia thin films on NaCl (001) surface
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