A generic “micro-Stoney” method for the measurement of internal stress and elastic modulus of ultrathin films-Reference-Cited by-同舟云学术

A generic “micro-Stoney” method for the measurement of internal stress and elastic modulus of ultrathin films

Published:2016-01 Issue:1 Volume:87 Page:015002
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Favache Audrey¹,Ryelandt Sophie¹^ORCID,Melchior Maxime¹,Zeb Gul²,Carbonnelle Pierre³,Raskin Jean-Pierre³,Pardoen Thomas¹

Affiliation:

1. Institute of Mechanics, Materials and Civil Engineering, Université catholique de Louvain, Place Sainte Barbe 2 L5.02.02, 1348 Louvain-la-Neuve, Belgium

2. Centre de Collaboration MiQro Innovation (C2MI), Bromont, Québec J2L 1S8, Canada

3. Information and Communications Technologies, Electronics and Applied Mathematics (ICTEAM), Microwave Laboratory, Université catholique de Louvain, 1348 Louvain-la-Neuve, Belgium

Funder

Communaute Francaise de Belgique

Walloon Region

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4939912

Reference62 articles.

1. Mechanical characterization of materials at small length scales

2. Nanostructured Thin Films and Coatings

3. Springer Handbook of Nanotechnology

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. On-chip very low strain rate rheology of amorphous olivine films;Acta Materialia;2024-03

2. Analytical solutions for film stress and bending deformation of coated optical lenses;International Journal of Mechanical Sciences;2023-05

3. On-Chip Very Low Strain Rate Rheology of Amorphous Olivine Films;2023

4. Estimation of the Young’s Modulus of Nanometer-Thick Films Using Residual Stress-Driven Bilayer Cantilevers;Nanomaterials;2022-01-14

5. Approaches to determining curvature of wafers by their topography;Physics-Uspekhi;2021-10