Author:
Landi Giovanni,Altavilla Claudia,Ciambelli Paolo,Neitzert Heinrich C.,Iannace Salvatore,Sorrentino Andrea
Reference22 articles.
1. Low-k dielectric materials
2. Porous low dielectric constant materials for microelectronics
3. T. K. Gupta, in Copp. Interconnect Technol. (2009), pp. 67–110.
4. P.S. Ho, J. Leu, and W.W. Lee, in Low Dielectr. Constant Mater. IC Appl. SE - 1, edited by P. Ho, J. Leu, and W. Lee (Springer Berlin Heidelberg, 2003), pp. 1–21.
5. Low dielectric constant materials for microelectronics
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