Deciphering the influence of high-flux helium plasma exposure on tungsten nanostructure growth using real-time, in situ spectroscopic ellipsometry
Author:
Affiliation:
1. Sandia National Laboratories, Plasma and Reacting Flow Science Department, Livermore, California 94550, USA
2. Department of Materials Science and Engineering, University of California, Berkeley, Berkeley, California 94720, USA
Funder
U.S. Department of Energy
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/am-pdf/10.1063/5.0077458
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