Fabrication of 300‐Å metal lines with substrate‐step techniques
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91716
Reference15 articles.
1. 250‐Å linewidths with PMMA electron resist
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5. X‐ray lithography at ∠100 Å linewidths using x‐ray masks fabricated by shadowing techniques
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