Vertical metrology using scanning-probe microscopes: Imaging distortions and measurement repeatability
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.367151
Reference5 articles.
1. Dimensional metrology with scanning probe microscopes
2. New method to estimate step heights in scanning-probe microscope images
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4. Analyzing atomic force microscopy images using spectral methods
5. Characterization of the low-pressure chemical vapor deposition grown rugged polysilicon surface using atomic force microscopy
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