Silicon-nitride nanosensors toward room temperature quantum optomechanics

Author:

Serra Enrico123ORCID,Borrielli Antonio12ORCID,Marin Francesco4567ORCID,Marino Francesco67ORCID,Malossi Nicola89ORCID,Morana Bruno3ORCID,Piergentili Paolo89ORCID,Prodi Giovanni Andrea10ORCID,Sarro Pasqualina Maria3ORCID,Vezio Paolo67ORCID,Vitali David89ORCID,Bonaldi Michele12ORCID

Affiliation:

1. Institute of Materials for Electronics and Magnetism, IMEM-CNR, Trento unit c/o Fondazione Bruno Kessler, Via alla Cascata 56/C, IT-38123 Povo, Trento, Italy

2. Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, Via Sommarive 14, IT-38123 Povo, Trento, Italy

3. Department of Microelectronics, Delft University of Technology, Feldmannweg 17, 2628 CT Delft, The Netherlands

4. Dipartimento di Fisica e Astronomia, Università di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy

5. European Laboratory for Non-Linear Spectroscopy (LENS), Via Carrara 1, I-50019 Sesto Fiorentino (FI), Italy

6. CNR-INO, L.go Enrico Fermi 6, I-50125 Firenze, Italy

7. INFN, Sezione di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy

8. Physics Division, School of Science and Technology, University of Camerino, Via Madonna delle Carceri 9, I-62032 Camerino (MC), Italy

9. INFN, Sezione di Perugia, via A. Pascoli, I-06123 Perugia, Italy

10. Dipartimento di Matematica, Università di Trento, I-38123 Povo, Trento, Italy

Funder

QuantERA - ERA NET Cofound in Quantum Technologies - EU Horizon 2020

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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