Mevva ion source operated in purely gaseous mode
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1691474
Reference12 articles.
1. Vacuum arc ion sources
2. The ‘‘TITAN’’ ion source
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4. Hybrid gas-metal co-implantation with a modified vacuum arc ion source
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