Metal-organic frameworks as promising candidates for future ultralow-k dielectrics
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3529461
Reference18 articles.
1. Ordered porous materials for emerging applications
2. Metal−Organic Frameworks: Structural, Energetic, Electronic, and Mechanical Properties
3. Challenges in the implementation of low-k dielectrics in the back-end of line
4. Novel Carbon-Cage-Based Ultralow-$k$ Materials: Modeling and First Experiments
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