Characterization of hard transparent B–C–N–H thin films formed by plasma chemical‐vapor deposition at room temperature
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.335826
Reference6 articles.
1. Chemical vapour deposition of thin films of BN onto fused silica and sapphire
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