Subject
Physics and Astronomy (miscellaneous)
Cited by
15 articles.
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1. Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2010-03
2. Carbon clustering in Si1−xCx formed by ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-12
3. Spectroscopic characterization of annealed Si1−xCx films synthesized by ion implantation;Journal of Materials Research;1996-09
4. Properties of fully implanted amorphous SixC1−x: H alloys;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1993-01
5. Nonlinear heterodyne detection;Topics in Applied Physics;1980