Eco-friendly electron beam lithography using water-developable resist material derived from biomass
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4737639
Reference24 articles.
1. Fabrication of Anisotropic Metal Nanostructures Using Innovations in Template-Assisted Lithography
2. Effect of selective nanopatterns on the performance of a pentacene-based thin-film transistor
3. DNA Separation in Nanowall Array Chips
4. Localization of Multiple DNA Sequences on Nanopatterns
5. Novel CD-SEM magnification calibration reference of sub-50-nm pitch multi-layer grating with positional identification mark
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