Optical emission from the laser‐induced plasma during excimer laser etching of diamondlike carbon films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.110375
Reference19 articles.
1. Characterization of diamondlike carbon films and their application as overcoats on thin‐film media for magnetic recording
2. Plasma-deposited amorphous carbon films as planarization layers
3. Amorphous carbon films as resist masks with high reactive ion etching resistance for nanometer lithography
4. Excimer-laser etching of diamond and hard carbon films by direct writing and optical projection
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