Accommodation of excess Ti in a (Ba, Sr)TiO3 thin film with 53.4% Ti grown on Pt/SiO2/Si by metalorganic chemical-vapor deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124674
Reference11 articles.
1. Step Coverage and Electrical Properties of(Ba,Sr)TiO3Films Prepared by Liquid Source Chemical Vapor Deposition UsingTiO(DPM)2
2. Manufacturing of perovskite thin films using liquid delivery MOCVD
3. Chemical Vapor Deposition of ( Ba , Sr ) TiO3
4. Dielectric Properties of (Ba, Sr)TiO3Thin Films Deposited by RF Sputtering
5. (Ba+Sr)/Ti ratio dependence of the dielectric properties for (Ba0.5Sr0.5)TiO3 thin films prepared by ion beam sputtering
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3. Barium strontium titanate-based perovskite materials for microwave applications;Progress in Solid State Chemistry;2007-01
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