Comparative study of the ion-slicing mechanism of Y-cut LiNbO3-Reference-Cited by-同舟云学术

Comparative study of the ion-slicing mechanism of Y-cut LiNbO3

Published:2019-08 Issue:8 Volume:9 Page:085001
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Huang Kai¹,Li Zhongxu¹^ORCID,Yan Youquan¹^ORCID,Zhao Xiaomeng¹,Li Wenqin¹,You Tiangui¹,Zhang Shibin¹,Zhou Hongyan¹,Lin Jiajie¹,Xu Wenhui¹,Yi Ailun¹,Huang Hao¹,Zhou Min¹,Yu Wenjie¹,Xie Junyu²,Zeng Xiaobin²,Liu Renjie³,Ou Xin¹^ORCID

Affiliation:

1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

2. Beijing Zhongkexin Electronics Equipment Co., Ltd, Beijing 101111, China

3. Shanghai Kingstone Semiconductor Joint Stock Co., Ltd, Shanghai 201399, China

Funder

Chinese-Austrian Cooperative R&D Project

National Key R&D Program of China

National Natural Science Foundation of China

One Hundred Talent Program of CAS

Shanghai Sailing Program

Shanghai Science and Technology Innovation Action Plan Program

Publisher

AIP Publishing

Subject