Breakthrough instruments and products: Investigation of atomic layer deposited Al:ZnO layer by spectroscopic ellipsometry from the deep-UV to the mid-IR in one instrument-Reference-Cited by-同舟云学术

Breakthrough instruments and products: Investigation of atomic layer deposited Al:ZnO layer by spectroscopic ellipsometry from the deep-UV to the mid-IR in one instrument

Published:2021-11-01 Issue:11 Volume:92 Page:119501
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Makai László¹^ORCID,Lehto Tero²^ORCID,Fodor Bálint¹^ORCID,King Peter²

Affiliation:

1. Semilab Semiconductor Physics Laboratory Co., Ltd., Prielle Kornélia u. 4/a., 1117 Budapest, Hungary

2. Picosun Oy, Masalantie 365, Masala FI-02430, Finland

Publisher

AIP Publishing

Subject

Instrumentation

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0071638

Reference6 articles.

1. Spectroscopic Ellipsometry

2. Structural and Electrical Properties of Atomic Layer Deposited Al-Doped ZnO Films

3. Electrical, optical, and electronic properties of Al:ZnO films in a wide doping range

4. See https://www.picosun.com/products/3d-object-coating-and-picomedical/picosun-p300b/ for Picosun 2021, Picosun products, 3D object coating and picomedical, PICOSUN® P-300B.

5. Optical properties of zinc oxide thin films doped with aluminum and lithium

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical Properties of TiO₂ Grown by Atomic Layer Deposition Using Various Oxidizing Agents: The Ellipsometry Analysis of Absorption Properties;Advanced Materials Interfaces;2024-07-12

2. Ellipsometric Study on the Uniformity of Al:ZnO Thin Films Deposited Using DC Sputtering at Room Temperature over Large Areas;Materials;2023-10-11

3. Spectroscopic ellipsometry investigation of free liquid-liquid and liquid-air interfaces;Thin Solid Films;2023-01