Total internal reflection ellipsometry of Au/SiOxNy waveguide structures for sensor applications
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Publisher
AIP Publishing
Link
http://aip.scitation.org/doi/pdf/10.1063/5.0135889
Reference12 articles.
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3. Optimization of Fabrication Process for SiON/SiOx Films Applicable as Optical Waveguides
4. A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
5. MH. Arwin, “TIRE and SPR-enhanced SE for adsorption processes,” in Ellipsometry of Functional organic Surfaces and Films, edited by K. Hinrichs and K.-J. Eichhorn (Springer Berlin Heidelberg, Berlin, Heidelberg, 2014) pp. 249–264.
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1. Spectroscopic ellipsometry of Au nanoparticles layers;AIP Conference Proceedings;2024
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