A large-area plasma source excited by a tunable surface wave cavity
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Published:1999-05
Issue:5
Volume:70
Page:2331-2337
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ISSN:0034-6748
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Container-title:Review of Scientific Instruments
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language:en
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Short-container-title:Review of Scientific Instruments
Author:
Wu T. J.,Kou C. S.
Cited by
32 articles.
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