Strain distribution control on the silicon wafer scale for advanced nanostructure fabrication
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1448855
Reference9 articles.
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2. Shape Transition of Germanium Nanocrystals on a Silicon (001) Surface from Pyramids to Domes
3. Long-range ordered lines of self-assembled Ge islands on a flat Si (001) surface
4. Lithographic positioning of self-assembled Ge islands on Si(001)
5. Regimented placement of self-assembled Ge dots on selectively grown Si mesas
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2. Critical conditions for SiGe island formation during Ge deposition on Si(100) at high temperatures;Materials Science in Semiconductor Processing;2017-01
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4. In situObservation of Surface Reconstruction of Si(001) with Stress/Strain Field Scanning Probe Microscopy;Japanese Journal of Applied Physics;2011-08-22
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