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Two-dimensional displacement measurement based on two parallel gratings

Published:2018-06 Issue:6 Volume:89 Page:065105
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Wei Peipei¹,Lu Xi¹,Qiao Decheng¹,Zou Limin¹,Huang Xiangdong¹,Tan Jiubin¹^ORCID,Lu Zhengang¹

Affiliation:

1. Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China

Funder

Basic metrological project

National Natural Science Foundation of China

Natural Science Foundation of Heilongjiang Province

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5024637

Reference16 articles.

1. Future semiconductor material requirements and innovations as projected in the ITRS 2005 roadmap

2. The long-range scanning stage: a novel platform for scanned-probe microscopy

3. Residual errors in laser interferometry from air turbulence and nonlinearity

4. Compact diffractive interferometric displacement sensor in reflection

5. Two-dimensional displacement sensing using a cross diffraction grating scheme

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1. Grating Structures for Silver-Based Surface Plasmon Resonance Sensors with Adjustable Excitation Angle;Sensors;2024-07-13

2. Digital synchronous measurement method for two-dimensional in-plane displacement using check-code;Measurement;2024-02

3. Two-dimensional grating interferometer with nanometer accuracy;AIP Advances;2023-12-01

4. Design of a measurement system for measuring geometric errors of a workpiece table during two-axis synchronous motion;Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture;2022-11-24

5. Grating-based 2D displacement measurement with quadruple optical subdivision of a single incident beam;Optics Express;2021-07-14

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